We are excited to share our results on large-scale fabrication compatible integration of superconducting Transmon qubits. With, so called, overlay Josephson junction approach we were able to fabricate in a fully fab-compatible way qubits with close to state-of-the-art coherence times. We also found that coherence times up to 0.1ms are not limited by losses inside the junction, but rather by microwave losses at the outer surfaces of the device.

phys.org article: High-quality superconducting qubits fabricated with CMOS-compatible technologies

Verjauw et al, npj Quantum Information 8, 93 (2022).